Optical microscope

Olympus MX61

Our Olympus MX61 Optical microscope system is capable of scanning wafers up to 200mm in diameter with its motorized stage. Together with its fast autofocus system that can capture up to 2-3 images per second, it allows for accurate inspection of defects and structures complementing the LBIC scanning technique. Macros were developed to automatically scan large arrays of samples and automatically analyze the properties of objects on all images. We correlate the detected features for instance with the LBIC measurements.

Example:

Optical image taken on a multicrystalline silicon solar cell after polishing and etching. The dark spots are etch pits from dislocations where they end at the surface.